검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Hydrocarbon Value Chain - Now Electricity Lewis WW, Gray DC Hydrocarbon Processing, 76(11), 118, 1997 |
| 2 |
Photochemical Dry-Etching of Doped and Undoped Silicon-Oxides Gray DC, Butterbaugh JW, Hiatt CF, Lawing AS, Sawin HH Journal of the Electrochemical Society, 142(11), 3859, 1995 |
| 3 |
Photochemical Dry Stripping of Silicon-Nitride Films Gray DC, Butterbaugh JW, Hiatt CF, Lawing AS, Sawin HH Journal of the Electrochemical Society, 142(11), 3919, 1995 |
| 4 |
Redeposition Kinetics in Fluorocarbon Plasma-Etching Gray DC, Mohindra V, Sawin HH Journal of Vacuum Science & Technology A, 12(2), 354, 1994 |
| 5 |
Influence of Reactant Transport on Fluorine Reactive Ion Etching of Deep Trenches in Silicon Arnold JC, Gray DC, Sawin HH Journal of Vacuum Science & Technology B, 11(6), 2071, 1993 |