검색결과 : 2건
No. | Article |
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1 |
In situ substrate temperature measurements during radio frequency sputtering of ZnO thin film using fiber Bragg grating Zayer NK, Henderson PJ, Grellier AJC, Pannell CN Journal of Vacuum Science & Technology A, 17(3), 871, 1999 |
2 |
In situ monitoring of sputtered zinc oxide films for piezoelectric transducers Zayer NK, Greef R, Rogers K, Grellier AJC, Pannell CN Thin Solid Films, 352(1-2), 179, 1999 |