검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Reactor-scale models for rf diode sputtering of metal thin films Desa S, Ghosal S, Kosut RL, Ebert JL, Abrahamson TE, Kozak A, Zou DW, Zhou X, Groves JF, Wadley HNG Journal of Vacuum Science & Technology A, 17(4), 1926, 1999 |
| 2 |
Directed Vapor-Deposition of Amorphous and Polycrystalline Electronic Materials - Nonhydrogenated A-Si Groves JF, Jones SH, Globus T, Hsiung LM, Wadley H Journal of the Electrochemical Society, 142(10), L173, 1995 |