검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Monolithic multichannel secondary electron detector for distributed axis electron beam lithography and inspection Pickard DS, Kenney C, Tanimoto S, Crane T, Groves T, Pease RFW Journal of Vacuum Science & Technology B, 25(6), 2277, 2007 |