검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Chemical vapor deposition of Si:C and Si:C:P films-Evaluation of material quality as a function of C content, carrier gas and doping Dhayalan SK, Loo R, Hikavyy A, Rosseel E, Bender H, Richard O, Vandervorst W Journal of Crystal Growth, 426, 75, 2015 |