검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography Schift H, Spreu C, Saidani M, Bednarzik M, Gobrecht J, Klukowska A, Reuther F, Gruetzner G, Solak HH Journal of Vacuum Science & Technology B, 27(6), 2846, 2009 |
| 2 |
Easy mask-mold fabrication for combined nanoimprint and photolithography Schift H, Spreu C, Schleunitz A, Gobrecht J, Klukowska A, Reuther F, Gruetzner G Journal of Vacuum Science & Technology B, 27(6), 2850, 2009 |
| 3 |
An epoxy photoresist modified by luminescent nanocrystals for the fabrication of 3D high-aspect-ratio microstructures Ingrosso C, Fakhfouri V, Striccoli M, Agostiano A, Voigt A, Gruetzner G, Curri ML, Brugger J Advanced Functional Materials, 17(13), 2009, 2007 |
| 4 |
Photoluminescence enhancement in metallic nanocomposite printable polymer Reboud V, Kehagias N, Striccoli M, Placido T, Panniello A, Curri ML, Zelsmann M, Reuther F, Gruetzner G, Torres CMS Journal of Vacuum Science & Technology B, 25(6), 2642, 2007 |
| 5 |
Submicron three-dimensional structures fabricated by reverse contact UV nanoimprint lithography Kehagias N, Reboud V, Chansin G, Zelsmann M, Jeppesen C, Reuther F, Schuster C, Kubenz M, Gruetzner G, Torres CMS Journal of Vacuum Science & Technology B, 24(6), 3002, 2006 |
| 6 |
Three-dimensional polymer structures fabricated by reversal ultraviolet-curing imprint lithography Kehagias N, Zelsmann M, Torres CMS, Pfeiffer K, Ahrens G, Gruetzner G Journal of Vacuum Science & Technology B, 23(6), 2954, 2005 |
| 7 |
Application of Optical Lithography for High-Aspect-Ratio Microstructures Loechel B, Demmeler R, Rothe M, Bruenger W, Fehlberg S, Gruetzner G Journal of Vacuum Science & Technology B, 14(6), 4179, 1996 |