검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Channeling measurements of ion implantation damage in 4H-SiC Kuznetsov AY, Janson MS, Hallen A, Svensson BG, Jagadish C, Grunleitner H, Pensl G Materials Science Forum, 353-356, 595, 2001 |
| 2 |
Deriving the kinetic parameters for Pt-silicide formation from temperature ramped in situ ellipsometric measurements Stark T, Grunleitner H, Hundhausen M, Ley L Thin Solid Films, 358(1-2), 73, 2000 |