화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Use of gas-phase ethanol to mitigate extreme UV/water oxidation of extreme UV optics
Klebanoff LE, Malinowski ME, Clift WM, Steinhaus C, Grunow P
Journal of Vacuum Science & Technology A, 22(2), 425, 2004
2 Characterization of multicrystalline silicon wafers by non-invasive measurements
Kunst M, Grunow P
Solar Energy Materials and Solar Cells, 83(4), 409, 2004
3 Radiation-induced protective carbon coating for extreme ultraviolet optics
Klebanoff LE, Clift WM, Malinowski ME, Steinhaus C, Grunow P, Bajt S
Journal of Vacuum Science & Technology B, 20(2), 696, 2002
4 Iron Silicide Formation on Hydrogenated Amorphous-Silicon
Grunow P, Paes H, Gatts C, Losch W
Thin Solid Films, 275(1-2), 191, 1996