검색결과 : 2건
No. | Article |
---|---|
1 |
Low-Temperature Atmospheric-Pressure Chemical-Vapor-Deposition for Epitaxial-Growth of SiGe Bipolar-Transistors Sedgwick TO, Grutzmacher DA Journal of the Electrochemical Society, 142(7), 2458, 1995 |
2 |
Effects of Trace Surface Oxidation in Low-Temperature Epitaxy-Grown from Dichlorosilane Sedgwick TO, Agnello PD, Grutzmacher DA Journal of the Electrochemical Society, 140(12), 3684, 1993 |