화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 High-resolution primary ion beam probe for SIMS
Guharay SK, Douglass S, Orloff J
Applied Surface Science, 231-2, 926, 2004
2 Characteristics of ion beams from a Penning source for focused ion beam applications
Guharay SK, Sokolovsky E, Orloff J
Journal of Vacuum Science & Technology B, 17(6), 2779, 1999
3 Characteristics of focused beam spots using negative ion beams from a compact surface plasma source and merits for new applications
Guharay SK, Sokolovsky E, Orloff J
Journal of Vacuum Science & Technology B, 16(6), 3370, 1998
4 High-Brightness Ion-Source for Ion Projection Lithography
Guharay SK, Wang W, Dudnikov VG, Reiser M, Orloff J, Melngailis J
Journal of Vacuum Science & Technology B, 14(6), 3907, 1996
5 Study of H- Beams for Ion-Projection Lithography
Chen CH, Guharay SK, Reiser M, Riordon J, Orloff J, Melngailis J
Journal of Vacuum Science & Technology B, 13(6), 2597, 1995