검색결과 : 5건
No. | Article |
---|---|
1 |
High-resolution primary ion beam probe for SIMS Guharay SK, Douglass S, Orloff J Applied Surface Science, 231-2, 926, 2004 |
2 |
Characteristics of ion beams from a Penning source for focused ion beam applications Guharay SK, Sokolovsky E, Orloff J Journal of Vacuum Science & Technology B, 17(6), 2779, 1999 |
3 |
Characteristics of focused beam spots using negative ion beams from a compact surface plasma source and merits for new applications Guharay SK, Sokolovsky E, Orloff J Journal of Vacuum Science & Technology B, 16(6), 3370, 1998 |
4 |
High-Brightness Ion-Source for Ion Projection Lithography Guharay SK, Wang W, Dudnikov VG, Reiser M, Orloff J, Melngailis J Journal of Vacuum Science & Technology B, 14(6), 3907, 1996 |
5 |
Study of H- Beams for Ion-Projection Lithography Chen CH, Guharay SK, Reiser M, Riordon J, Orloff J, Melngailis J Journal of Vacuum Science & Technology B, 13(6), 2597, 1995 |