검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition Fanaei T, Camjre N, Aktik C, Gujrathi S, Lessard A, Awad Y, Oulachgar E, Scarlete M Thin Solid Films, 516(12), 3755, 2008 |
| 2 |
Influence of the film properties on the plasma etching dynamics of rf-sputtered indium zinc oxide layers Stafford L, Lim WT, Pearton SJ, Chicoine M, Gujrathi S, Schiettekatte F, Kravchenko II Journal of Vacuum Science & Technology A, 25(4), 659, 2007 |
| 3 |
Chemical and structural characterization of SiONC dielectric thin film deposited by PSCVD Oulachgar EH, Aktik C, Dostie S, Sowerby R, Gujrathi S, Scarlete M Journal of the Electrochemical Society, 153(11), F255, 2006 |
| 4 |
Characterization GaAs1-xNx epitaxial layers by ion beam analysis Wei P, Chicoine M, Gujrathi S, Schiettekatte F, Beaudry JN, Masut RA, Desjardins P Journal of Vacuum Science & Technology A, 22(3), 908, 2004 |