검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Repair of Plasma Etch Related Gate Perimeter Damage Using Low-Temperature Oxidation Guldi RL, Wyke DR Journal of the Electrochemical Society, 143(2), 628, 1996 |
| 2 |
Source Drain Dislocations and Electrical Leakage in Titanium-Salicided CMOS Integrated-Circuits Guldi RL Journal of the Electrochemical Society, 141(7), 1957, 1994 |
| 3 |
Effect of Device Processing Conditions on Extended Dislocations and Defects in Ti-Salicided Source/Drain Regions of Silicon Integrated-Circuits Guldi RL Journal of the Electrochemical Society, 140(12), 3650, 1993 |