검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low temperature selective and lateral epitaxial growth of silicon carbide on patterned silicon substrates Jacob C, Pirouz P, Nishino S Materials Science Forum, 353-356, 127, 2001 |
| 2 |
Selective epitaxial growth of silicon carbide on patterned silicon substrates using hexachlorodisilane and propane Jacob C, Hong MH, Chung J, Pirouz P, Nishino S Materials Science Forum, 338-3, 249, 2000 |