검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Model etch profiles for ion energy distribution functions in an inductively coupled plasma reactor Chen WJ, Abraham-Shrauner B, Woodworth JR Journal of Vacuum Science & Technology B, 17(5), 2061, 1999 |
| 2 |
Global-Model of Plasma Chemistry in a High-Density Oxygen Discharge Lee C, Graves DB, Lieberman MA, Hess DW Journal of the Electrochemical Society, 141(6), 1546, 1994 |