검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Growth and characterization of ZnO film on Si(111) substrate by helicon wave plasma-assisted evaporation Lee DY, Choi CH, Kim SH Journal of Crystal Growth, 268(1-2), 184, 2004 |
| 2 |
High growth-rate fabrication of micro-crystalline silicon by Helicon wave plasma CVD Endo K, Isomura M, Taguchi M, Tarui H, Kiyama S Solar Energy Materials and Solar Cells, 66(1-4), 283, 2001 |
| 3 |
SiO2 etching using high density plasma sources Tsukada T, Nogami H, Nakagawa Y, Wani E, Mashimo K, Sato H, Samukawa S Thin Solid Films, 341(1-2), 84, 1999 |