검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-rate deposition and mechanical properties of SiOx film at low temperature by plasma enhanced chemical vapor deposition with the dual frequencies ultra high frequency and high frequency Jin SB, Lee JS, Choi YS, Choi IS, Han JG Thin Solid Films, 519(19), 6334, 2011 |