검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers Keller S, Haefliger D, Boisen A Journal of Vacuum Science & Technology B, 25(6), 1903, 2007 |
| 2 |
Self-positioning of polymer membranes driven by thermomechanically induced plastic deformation Haefliger D, Hansen O, Boisen A Advanced Materials, 18(2), 238, 2006 |