검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Developer temperature effect on negative deep ultraviolet resists : Characterization, modeling, and simulation Hagouel PI, Karafyllidis I, Neureuther AR Journal of Vacuum Science & Technology B, 15(6), 2616, 1997 |
| 2 |
Negative Resist Corner Rounding - Envelope Volume Modeling Hagouel PI, Neureuther AR, Zenk AM Journal of Vacuum Science & Technology B, 14(6), 4257, 1996 |