검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Integration of block copolymer directed assembly with 193 immersion lithography Liu CC, Nealey PF, Raub AK, Hakeem PJ, Brueck SRJ, Han E, Gopalan P Journal of Vacuum Science & Technology B, 28(6), C6B30, 2010 |
| No. | Article |
|---|---|
| 1 |
Integration of block copolymer directed assembly with 193 immersion lithography Liu CC, Nealey PF, Raub AK, Hakeem PJ, Brueck SRJ, Han E, Gopalan P Journal of Vacuum Science & Technology B, 28(6), C6B30, 2010 |