검색결과 : 1건
No. | Article |
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1 |
Improved Control Techniques for the Reactive Magnetron Sputtering of Silicon to Produce Silicon-Oxide and the Implications for Selected Film Properties Danson N, Hall GW, Howson RP Thin Solid Films, 289(1-2), 99, 1996 |
No. | Article |
---|---|
1 |
Improved Control Techniques for the Reactive Magnetron Sputtering of Silicon to Produce Silicon-Oxide and the Implications for Selected Film Properties Danson N, Hall GW, Howson RP Thin Solid Films, 289(1-2), 99, 1996 |