검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Experimental and theoretical study of ion distributions near 300 mu m tall steps on rf-biased wafers in high density plasmas Woodworth JR, Miller PA, Shul RJ, Abraham IC, Aragon BP, Hamilton TW, Willison CG, Kim D, Economou DJ Journal of Vacuum Science & Technology A, 21(1), 147, 2003 |
| 2 |
Ion energy distributions at rf-biased wafer surfaces Woodworth JR, Abraham IC, Riley ME, Miller PA, Hamilton TW, Aragon BP, Shul RJ, Willison CG Journal of Vacuum Science & Technology A, 20(3), 873, 2002 |
| 3 |
Ion energy distributions versus frequency and ion mass at the rf-biased electrode in an inductively driven discharge Abraham IC, Woodworth JR, Riley ME, Miller PA, Hamilton TW, Aragon BP Journal of Vacuum Science & Technology A, 20(5), 1759, 2002 |
| 4 |
Absolute intensities of the vacuum ultraviolet spectra in oxide etch plasma processing discharges Woodworth JR, Riley ME, Arnatucci VA, Hamilton TW, Aragon BP Journal of Vacuum Science & Technology A, 19(1), 45, 2001 |
| 5 |
Surface dependent electron and negative ion density in inductively coupled discharges Hebner GA, Blain MG, Hamilton TW, Nichols CA, Jarecki RL Journal of Vacuum Science & Technology A, 17(6), 3172, 1999 |
| 6 |
Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge Woodworth JR, Blain MG, Jarecki RL, Hamilton TW, Aragon BP Journal of Vacuum Science & Technology A, 17(6), 3209, 1999 |
| 7 |
Influence of surface material on the boron chloride density in inductively coupled discharges Hebner GA, Blain MG, Hamilton TW Journal of Vacuum Science & Technology A, 17(6), 3218, 1999 |
| 8 |
Positive ion species in high-density discharges containing chlorine and boron-trichloride Woodworth JR, Nichols CA, Hamilton TW Journal of Vacuum Science & Technology A, 16(6), 3235, 1998 |
| 9 |
Ion energy distribution functions in inductively coupled radio-frequency discharges - Mixtures of Cl-2/BCl3/Ar Nichols CA, Woodworth JR, Hamilton TW Journal of Vacuum Science & Technology A, 16(6), 3389, 1998 |
| 10 |
Ion Distribution-Functions in Inductively-Coupled Radio-Frequency Discharges in Argon-Chlorine Mixtures Woodworth JR, Riley ME, Miller PA, Nichols CA, Hamilton TW Journal of Vacuum Science & Technology A, 15(6), 3015, 1997 |