화학공학소재연구정보센터
검색결과 : 19건
No. Article
1 Effect of deposition condition on residual stress of iron nitride thin films prepared by magnetron sputtering and ion implantation
Li WL, Fei WD, Hanabusa T
Applied Surface Science, 252(8), 2847, 2006
2 Internal stress measurement of fiber reinforced composite by neutron diffraction with in-situ low temperature stress measurement system
Nishida M, Muslih MR, Ikeuchi Y, Minakawa N, Hanabusa T
Materials Science Forum, 490-491, 239, 2005
3 In-situ observation of thermal stress in nano-size thin aluminum films
Hanabusa T, Kusaka K, Shingubara S, Sakata O
Materials Science Forum, 490-491, 577, 2005
4 Effect of substrate temperature on crystal orientation and residual stress in RF sputtered gallium nitride films
Kusaka K, Hanabusa T, Tominaga K, Yamauchi N
Materials Science Forum, 490-491, 613, 2005
5 Evaluation of residual stress in nano-TiO2 film on ITO glass by synchrotron X-ray diffraction
Ju DY, Ueda T, Hatakeyama T, Arizono T, Kusaka K, Hanabusa T
Materials Science Forum, 490-491, 637, 2005
6 Residual stress measurement in sputtered copper thin films by synchrotron radiation and ordinary X-rays
Hataya M, Hanabusa T, Kusaka K, Tominaga K, Matsue T, Sakata O
Materials Science Forum, 490-491, 661, 2005
7 Effect of substrate temperature on crystal orientation and residual stress in radio frequency sputtered gallium-nitride films
Kusaka K, Hanabusa T, Tominaga K, Yamauchi N
Journal of Vacuum Science & Technology A, 22(4), 1587, 2004
8 X-ray elastic constants of chromium nitride films deposited by arc-ion plating
Hanabusa T, Miyagi K, Kusaka K
Journal of Vacuum Science & Technology A, 22(4), 1785, 2004
9 Residual stress and thermal stress observation in thin copper films
Hanabusa T, Kusaka K, Sakata O
Thin Solid Films, 459(1-2), 245, 2004
10 Production of Si3N4/Si3N4 and Si3N4/Al2O3 composites by CVD coating of fine particles with ultrafine powder
Hanabusa T, Uemiya S, Kojima T
Chemical Engineering Science, 54(15-16), 3335, 1999