검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Automated Tuning of an Electron-Cyclotron-Resonance Cavity to a Microwave-Power Source Hanish CK, Grizzle JW Journal of Vacuum Science & Technology A, 15(5), 2717, 1997 |
| 2 |
Sensor Systems for Real-Time Feedback-Control of Reactive Ion Etching Benson TE, Kamlet LI, Ruegsegger SM, Hanish CK, Hanish PD, Rashap BA, Klimecky P, Freudenberg JS, Grizzle JW, Khargonekar PP, Terry FL, Barney B Journal of Vacuum Science & Technology B, 14(1), 483, 1996 |
| 3 |
Minimized Response-Time of Optical-Emission and Mass-Spectrometric Signals for Optimized End-Point Detection Thomas S, Chen HH, Hanish CK, Grizzle JW, Pang SW Journal of Vacuum Science & Technology B, 14(4), 2531, 1996 |