화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Defects generated by MF magnetron sputtering and their influences on the electrical and optical properties of Al doped ZnO thin films
Hao CS, Shirolkar MM, Li JN, Wu BJ, Yin SL, Li M, Wang HQ
Applied Surface Science, 351, 392, 2015
2 The influences of high energetic oxygen negative ions and active oxygen on the microstructure and electrical properties of ZnO:Al films by MF magnetron sputtering
Hao CS, Xie B, Li M, Wang HQ, Jiang YS, Song YZ
Applied Surface Science, 258(20), 8234, 2012