검색결과 : 2건
No. | Article |
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1 |
Defects generated by MF magnetron sputtering and their influences on the electrical and optical properties of Al doped ZnO thin films Hao CS, Shirolkar MM, Li JN, Wu BJ, Yin SL, Li M, Wang HQ Applied Surface Science, 351, 392, 2015 |
2 |
The influences of high energetic oxygen negative ions and active oxygen on the microstructure and electrical properties of ZnO:Al films by MF magnetron sputtering Hao CS, Xie B, Li M, Wang HQ, Jiang YS, Song YZ Applied Surface Science, 258(20), 8234, 2012 |