검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Microwave plasma chemical vapor deposition of diamond films with low residual stress on large area porous silicon substrates Khan MA, Haque MS, Naseem HA, Brown WD, Malshe AP Thin Solid Films, 332(1-2), 93, 1998 |
| 2 |
The Effects of Moisture on Strain Relief of Si-O Bonds in Plasma-Enhanced Chemical-Vapor-Deposited Silicon Dioxide Films Haque MS, Naseem HA, Brown WD Journal of the Electrochemical Society, 144(9), 3265, 1997 |
| 3 |
Post-deposition processing of low temperature PECVD silicon dioxide films for enhanced stress stability Haque MS, Naseem HA, Brown WD Thin Solid Films, 308-309, 68, 1997 |
| 4 |
High pressure high power microwave plasma chemical vapor deposition of large area diamond films Naseem HA, Haque MS, Khan MA, Malshe AP, Brown WD Thin Solid Films, 308-309, 141, 1997 |
| 5 |
Characterization of High-Rate Deposited PECVD Silicon Dioxide Films for Mcm Applications Haque MS, Naseem HA, Brown WD Journal of the Electrochemical Society, 142(11), 3864, 1995 |