검색결과 : 21건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of titanium dioxide nanostructures using carbon nanosheets as a template Rooth M, Quinlan RA, Widenkvist E, Lu J, Grennberg H, Holloway BC, Harsta A, Jansson U Journal of Crystal Growth, 311(2), 373, 2009 |
| 2 |
Growth of SnO2 thin films by atomic layer deposition and chemical vapour deposition: A comparative study Sundqvist J, Lu J, Ottosson M, Harsta A Thin Solid Films, 514(1-2), 63, 2006 |
| 3 |
Analytical TEM characterization of the interfacial layer between ALD HfO2 film and silicon substrate Lu J, Aarik J, Sundqvist J, Kukli K, Harsta A, Carlsson JO Journal of Crystal Growth, 273(3-4), 510, 2005 |
| 4 |
Atomic layer deposition and characterization of HfO2 films on noble metal film substrates Kukli K, Aaltonen T, Aarik J, Lu J, Ritala M, Ferrari S, Harsta A, Leskela M Journal of the Electrochemical Society, 152(7), F75, 2005 |
| 5 |
Engineering structure and properties of hafnium oxide films by atomic layer deposition temperature Kukli K, Aarik J, Uustare T, Lu J, Ritala M, Aidla A, Pung L, Harsta A, Leskela M, Kikas A, Sammelselg V Thin Solid Films, 479(1-2), 1, 2005 |
| 6 |
Microstructure characterisation of ALD-grown epitaxial SnO2 thin films Lu J, Sundqvist J, Ottosson M, Tarre A, Rosental A, Aarik J, Harsta A Journal of Crystal Growth, 260(1-2), 191, 2004 |
| 7 |
Properties of HfO2 thin films grown by ALD from hafnium tetrakis(ethylmethylamide) and water Kukli K, Ritala M, Lu J, Harsta A, Leskela M Journal of the Electrochemical Society, 151(8), F189, 2004 |
| 8 |
Atomic layer deposition of polycrystalline HfO2 films by the HfI4-O-2 precursor combination Sundqvist J, Harsta A, Aarik J, Kukli K, Aidla A Thin Solid Films, 427(1-2), 147, 2003 |
| 9 |
Epitaxial growth of TiO2 films in a hydroxyl-free atomic layer deposition process Schuisky M, Kukli K, Aarik J, Lu J, Harsta A Journal of Crystal Growth, 235(1-4), 293, 2002 |
| 10 |
Atomic layer growth of epitaxial TiO2 thin films from TiCl4 and H2O on alpha-Al2O3 substrates Aarik J, Aidla A, Mandar H, Uustare T, Schuisky M, Harsta A Journal of Crystal Growth, 242(1-2), 189, 2002 |