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| No. | Article |
|---|---|
| 1 |
Equivalent oxide thickness reduction of interpoly dielectric using ALD-Al2O3 for flash device application Lee TP, Jang C, Haselden B, Dong M, Park S, Bartholomew L, Chatham H, Senzaki Y Journal of Vacuum Science & Technology B, 22(5), 2295, 2004 |