검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon Hasunuma E, Sugahara S, Hoshino S, Imai S, Ikeda K, Matsumura M Journal of Vacuum Science & Technology A, 16(2), 679, 1998 |
| No. | Article |
|---|---|
| 1 |
Gas-phase-reaction-controlled atomic-layer-epitaxy of silicon Hasunuma E, Sugahara S, Hoshino S, Imai S, Ikeda K, Matsumura M Journal of Vacuum Science & Technology A, 16(2), 679, 1998 |