검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
In situ infrared spectroscopic ellipsometry for blanket aluminum chemical vapor deposition on TiN and on SiO2/Si Weidner M, Weidner G, Hausmann P, Ritter G Thin Solid Films, 313-314, 737, 1998 |
| No. | Article |
|---|---|
| 1 |
In situ infrared spectroscopic ellipsometry for blanket aluminum chemical vapor deposition on TiN and on SiO2/Si Weidner M, Weidner G, Hausmann P, Ritter G Thin Solid Films, 313-314, 737, 1998 |