검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Measurement of the Gas Temperature in Fluorocarbon Radio-Frequency Discharges Using Infrared-Absorption Spectroscopy Haverlag M, Stoffels E, Stoffels WW, Kroesen GM, Dehoog FJ Journal of Vacuum Science & Technology A, 14(2), 380, 1996 |
| 2 |
Production and Destruction of Cfx Radicals in Radiofrequency Fluorocarbon Plasmas Haverlag M, Stoffels WW, Stoffels E, Kroesen GM, Dehoog FJ Journal of Vacuum Science & Technology A, 14(2), 384, 1996 |
| 3 |
The Chemistry of a Ccl2F2 Radio-Frequency Discharge Stoffels WW, Stoffels E, Haverlag M, Kroesen GM, Dehoog FJ Journal of Vacuum Science & Technology A, 13(4), 2058, 1995 |
| 4 |
Fluorocarbon High-Density Plasmas .1. Fluorocarbon Film Deposition and Etching Using CF4 and Chf3 Oehrlein GS, Zhang Y, Vender D, Haverlag M Journal of Vacuum Science & Technology A, 12(2), 323, 1994 |
| 5 |
Measurements of Radical Densities in Radiofrequency Fluorocarbon Plasmas Using Infrared-Absorption Spectroscopy Haverlag M, Stoffels E, Stoffels WW, Kroesen GM, Dehoog FJ Journal of Vacuum Science & Technology A, 12(6), 3102, 1994 |
| 6 |
Sidewall Passivation During the Etching of Poly-Si in an Electron-Cyclotron-Resonance Plasma of HBr Haverlag M, Oehrlein GS, Vender D Journal of Vacuum Science & Technology B, 12(1), 96, 1994 |