검색결과 : 3건
No. | Article |
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1 |
Monitor and control for development technology Ito S, Hayasaki K Journal of Vacuum Science & Technology B, 21(6), 3177, 2003 |
2 |
Cluster-Size Measurement Using Microtrench in a Thermal Plasma Flash Evaporation Process Takamura Y, Hayasaki K, Terashima K, Yoshida T Journal of Vacuum Science & Technology B, 15(3), 558, 1997 |
3 |
The Role of Radicals and Clusters in Thermal Plasma Flash Evaporation Processing Takamura Y, Hayasaki K, Terashima K, Yoshida T Plasma Chemistry and Plasma Processing, 16(1), 141, 1996 |