검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Silicon epitaxy using tetrasilane at low temperatures in ultra-high vacuum chemical vapor deposition Hazbun R, Hart J, Hickey R, Ghosh A, Fernando N, Zollner S, Adam TN, Kolodzey J Journal of Crystal Growth, 444, 21, 2016 |
| 2 |
Tetrasilane and digermane for the ultra-high vacuum chemical vapor deposition of SiGe alloys Hart J, Hazbun R, Eldridge D, Hickey R, Fernando N, Adam T, Zollner S, Kolodzey J Thin Solid Films, 604, 23, 2016 |