검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Fabrication of open stencil masks with asymmetric void ratio for the ion projection lithography space charge experiment Volland B, Shi F, Heerlein H, Rangelow IW, Hudek P, Kostic I, Cekan E, Vonach H, Loeschner H, Horner C, Stengl G, Buschbeck H, Zeininger M, Bleeker A, Benschop J Journal of Vacuum Science & Technology B, 18(6), 3202, 2000 |
| 2 |
Dry etching with gas chopping without rippled sidewalls Volland B, Hudek FS, Heerlein H, Rangelow IW Journal of Vacuum Science & Technology B, 17(6), 2768, 1999 |
| 3 |
Experimental results of the stochastic Coulomb interaction in ion projection lithography de Jager PWH, Derksen G, Mertens B, Cekan E, Lammer G, Vonach H, Buschbeck H, Zeininger M, Horner C, Loschner H, Stengl G, Bleeker AJ, Benschop J, Shi F, Volland B, Hudek P, Heerlein H, Rangelow IW, Kaesmaier R Journal of Vacuum Science & Technology B, 17(6), 3098, 1999 |