검색결과 : 1건
No. | Article |
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1 |
TwinMag (TM) II: attempts to improve an excellent sputter tool Heister U, Krempel-Hesse J, Szczyrbowski J, Teschner G, Bruch J, Brauer G Thin Solid Films, 351(1-2), 27, 1999 |
No. | Article |
---|---|
1 |
TwinMag (TM) II: attempts to improve an excellent sputter tool Heister U, Krempel-Hesse J, Szczyrbowski J, Teschner G, Bruch J, Brauer G Thin Solid Films, 351(1-2), 27, 1999 |