검색결과 : 16건
| No. | Article |
|---|---|
| 1 |
One-Step Synthesis of Silicon Oxynitride Films Using a Steady-State and High-Flux Helicon-Wave Excited Nitrogen Plasma Huang TY, Jin CG, Yu J, Yang Y, Zhuge LJ, Wu XM, Sha ZD Plasma Chemistry and Plasma Processing, 37(4), 1237, 2017 |
| 2 |
Self-consistent simulation study on magnetized inductively coupled plasma for 450 mm semiconductor wafer processing Lee HJ, Kim YG Thin Solid Films, 521, 78, 2012 |
| 3 |
Heat flux estimation of a plasma rocket helicon source by solution of the inverse heat conduction problem Mulcahy JM, Browne DJ, Stanton KT, Diaz FRC, Cassady LD, Berisford DF, Bengtson RD International Journal of Heat and Mass Transfer, 52(9-10), 2343, 2009 |
| 4 |
The effect of defects on the optical nonlinearity of thermally poled SiOx thin films Li WT, Boswell R, Samoc A, Samoc A, Wang RP Thin Solid Films, 516(16), 5474, 2008 |
| 5 |
Plasma propulsion for interplanetary flight Chang-Diaz FR Thin Solid Films, 506, 449, 2006 |
| 6 |
Modeling electromagnetic field excitation and rf power absorption in a large helicon plasma Shamrai KP, Shinohara S Thin Solid Films, 506, 555, 2006 |
| 7 |
Plasma performance in very large helicon device Tanikawa T, Shinohara S Thin Solid Films, 506, 559, 2006 |
| 8 |
High power light gas helicon plasma source for VASIMR Squire JP, Chang-Diaz FR, Glover TW, Jacobson VT, McCaskill GE, Winter DS, Baity FW, Carter MD, Goulding RH Thin Solid Films, 506, 579, 2006 |
| 9 |
Focusing magnetic field contribution for helicon plasma on Mini-RFTF Yoshitaka M, Hideki N, Baity FW, Goulding RH, Carter MD, Sparks DO Thin Solid Films, 506, 583, 2006 |
| 10 |
Small helicon plasma source for electric propulsion Toki K, Shinohara S, Tanikawa T, Shamrai KP Thin Solid Films, 506, 597, 2006 |