검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Extended Operation of a Wide-Range, All-Magnetic Bearing Turbomolecular Pump Without Backing Thompson JR, Weber PM, Hellmer R Journal of Vacuum Science & Technology A, 14(5), 2965, 1996 |
| No. | Article |
|---|---|
| 1 |
Extended Operation of a Wide-Range, All-Magnetic Bearing Turbomolecular Pump Without Backing Thompson JR, Weber PM, Hellmer R Journal of Vacuum Science & Technology A, 14(5), 2965, 1996 |