검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma etching of HfO2 at elevated temperatures in chlorine-based chemistry Helot M, Chevolleau T, Vallier L, Joubert O, Blanquet E, Pisch A, Mangiagalli P, Lill T Journal of Vacuum Science & Technology A, 24(1), 30, 2006 |
| No. | Article |
|---|---|
| 1 |
Plasma etching of HfO2 at elevated temperatures in chlorine-based chemistry Helot M, Chevolleau T, Vallier L, Joubert O, Blanquet E, Pisch A, Mangiagalli P, Lill T Journal of Vacuum Science & Technology A, 24(1), 30, 2006 |