검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Dopant diffusion barrier properties of ultrathin, chemically grown oxide films Herner SB, Eckert VL Electrochemical and Solid State Letters, 9(2), G34, 2006 |
| 2 |
Low temperature deposition and crystallization of large-grained Ge films on TiN Herner SB Electrochemical and Solid State Letters, 9(5), G161, 2006 |
| 3 |
Three-dimensional thin-film-transistor silicon-oxide-nitride-oxide-silicon memory cell formed on large grain sized polysilicon films using nuclei induced solid phase crystallization Gu S, Dunton SV, Walker AJ, Nallamothu S, Chen EH, Mahajani M, Herner SB, Eckert VL, Hu S, Konevecki M, Petti C, Radigan S, Raghuram U, Vyvoda MA Journal of Vacuum Science & Technology B, 23(5), 2184, 2005 |
| 4 |
Silicon deposition from BCI3/SiH4 mixtures: Effect of very high boron concentration on microstructure Herner SB, Clark MH Journal of Vacuum Science & Technology B, 22(1), 1, 2004 |
| 5 |
Fluorine barrier properties of bias-sputtered tungsten films Herner SB, Zhang HM, Sun B, Tanaka Y, Shi W, Yang SX, Lum R, Littau KA, Saleh A Journal of the Electrochemical Society, 147(5), 1936, 2000 |
| 6 |
"Volcano" reactions in oxide vias between tungsten CVD and bias sputtered TiN/Ti films Herner SB, Tanaka Y, Zhang H, Ghanayem SG Journal of the Electrochemical Society, 147(5), 1982, 2000 |
| 7 |
Morphology of TiSi2 Films on Si Formed from Co-Deposited Ti and Si Herner SB, Krishnamoorthy V, Naman A, Jones KS, Gossmann HJ, Tung RT Thin Solid Films, 302(1-2), 127, 1997 |
| 8 |
Surface Roughness-Induced Artifacts in Secondary-Ion Mass-Spectrometry Depth Profiling and a Simple Technique to Smooth the Surface Herner SB, Gila BP, Jones KS, Gossmann HJ, Poate JM, Luftman HS Journal of Vacuum Science & Technology B, 14(6), 3593, 1996 |