검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Effect of nitrogen content on the degradation mechanisms of thin Ta-Si-N diffusion barriers for Cu metallization Hubner R, Hecker M, Mattern N, Hoffmann V, Wetzig K, Heuer H, Wenzel C, Engelmann HJ, Gehre D, Zschech E Thin Solid Films, 500(1-2), 259, 2006 |
| 2 |
Thin tantalum-silicon-oxygen/tantalum-silicon-nitrogen films as high efficiency humidity diffusion barriers for solar cell encapsulation Heuer H, Wenzel C, Herrmann D, Hubner R, Zhang ZL, Bartha JW Thin Solid Films, 515(4), 1612, 2006 |
| 3 |
Characterization of thin Ta-Si-N-x layers of different nitrogen content using XPS, UPS and STM Zahn W, Hildebrand D, Menzel S, Oswald S, Heuer H Applied Surface Science, 252(1), 89, 2005 |
| 4 |
PCR detection of oxytetracycline resistance genes otr(A) and otr(B) in tetracycline-resistant streptomycete isolates from diverse habitats Nikolakopoulou T, Egan S, van Overbeek L, Guillaume G, Heuer H, Wellington EMH, van Elsas JD, Collard JM, Smalla K, Karagouni A Current Microbiology, 51(4), 211, 2005 |
| 5 |
Influence of nitrogen content on the crystallization behavior of thin Ta-Si-N diffusion barriers Hubner R, Hecker M, Mattern N, Voss A, Acker J, Hoffmann V, Wetzig K, Engelmann HJ, Zschech E, Heuer H, Wenzel C Thin Solid Films, 468(1-2), 183, 2004 |