검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of N-2 and NH3 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics Park KS, Baek KH, Kim DP, Woo JC, Do LM, No KS Applied Surface Science, 257(4), 1347, 2010 |
| No. | Article |
|---|---|
| 1 |
Effects of N-2 and NH3 remote plasma nitridation on the structural and electrical characteristics of the HfO2 gate dielectrics Park KS, Baek KH, Kim DP, Woo JC, Do LM, No KS Applied Surface Science, 257(4), 1347, 2010 |