검색결과 : 1건
No. | Article |
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1 |
Study of HfSiO film prepared by electron beam evaporation for high-k gate dielectric applications Cheng XH, Song ZR, Jiang J, Yu YH, Yang WW, Shen DS Applied Surface Science, 252(23), 8073, 2006 |
No. | Article |
---|---|
1 |
Study of HfSiO film prepared by electron beam evaporation for high-k gate dielectric applications Cheng XH, Song ZR, Jiang J, Yu YH, Yang WW, Shen DS Applied Surface Science, 252(23), 8073, 2006 |