검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces Krishnamoorthy S, Van den Boogaart MAF, Brugger J, Hibert C, Pugin R, Hinderling C, Heinzelmann H Advanced Materials, 20(18), 3533, 2008 |
| 2 |
Study of a mechanically clamped cryo-chuck device in a high density plasma for deep anisotropic etching of silicon Hibert C, Aachboun S, Boufnichel M, Ranson P Journal of Vacuum Science & Technology A, 19(2), 646, 2001 |