검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering Sah RE, Kirste L, Baeumler M, Hiesinger P, Cimalla V, Lebedev V, Baumann H, Zschau HE Journal of Vacuum Science & Technology A, 28(3), 394, 2010 |
| 2 |
Analysis of peculiar structural defects created in GaAs by diffusion of copper Frigeri C, Weyher JL, Muller S, Hiesinger P Journal of Crystal Growth, 210(1-3), 177, 2000 |