검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Modeling the effect of power on the growth properties of microcrystalline silicon films in the high-pressure depletion regime Li R, Chen XP, Chen YS, Hao XL, Lu JX, Yang SE Thin Solid Films, 562, 140, 2014 |
| 2 |
Solar cell of 6.3% efficiency employing high deposition rate (8 nm/s) microcrystalline silicon photovoltaic layer Sobajima Y, Nishino M, Fukumori T, Kurihara M, Higuchi T, Nakano S, Toyama T, Okamoto H Solar Energy Materials and Solar Cells, 93(6-7), 980, 2009 |
| 3 |
Growth of device grade mu c-Si film at over 50 A/s using PECVD Suzuki S, Kondo M, Matsuda A Solar Energy Materials and Solar Cells, 74(1-4), 489, 2002 |
| 4 |
High rate growth of microcrystalline silicon using a high-pressure depletion method with VHF plasma Fukawa M, Suzuki S, Guo LH, Kondo M, Matsuda A Solar Energy Materials and Solar Cells, 66(1-4), 217, 2001 |