검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Properties of high-k/ultrahigh purity silicon nitride stacks Shi X, Shriver M, Zhang Z, Higman T, Campbell SA Journal of Vacuum Science & Technology A, 22(4), 1146, 2004 |
| No. | Article |
|---|---|
| 1 |
Properties of high-k/ultrahigh purity silicon nitride stacks Shi X, Shriver M, Zhang Z, Higman T, Campbell SA Journal of Vacuum Science & Technology A, 22(4), 1146, 2004 |