검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Depth profiling of oxynitride film formed on Si(100) by photon energy dependent photoelectron spectroscopy Nishizaki K, Nohira H, Takahashi K, Kamakura N, Takata Y, Shin S, Kobayashi K, Tamura N, Hikazutani K, Hattori T Applied Surface Science, 216(1-4), 287, 2003 |
| 2 |
Compositional depth profiling of ultrathin oxynitride/Si interface using XPS Kato H, Nishizaki K, Takahashi K, Nohira H, Tamura N, Hikazutani K, Sano S, Hattori T Applied Surface Science, 190(1-4), 39, 2002 |