검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
An analysis of the impact of native oxide, surface contamination and material density on total electron yield in the absence of surface charging effects Iida S, Ohya K, Hirano R, Watanabe H Applied Surface Science, 384, 244, 2016 |
| 2 |
Pattern Positioning Error of Reticle Writing Induced by Reticle Clamping Hirano R, Matsuki K, Yoshitake S, Takahashi Y, Tamamushi S, Ogawa Y, Tojo T Journal of Vacuum Science & Technology B, 13(6), 2625, 1995 |
| 3 |
Evaluation of Overlay Accuracy for the X-Ray Stepper Toxs-1 Hirano R, Higashiki T, Nomura H, Kuwabara O, Nishizaka T, Uchida N Journal of Vacuum Science & Technology B, 12(6), 3247, 1994 |
| 4 |
X-Ray Stepper Aiming at 0.2-Mu-M Synchrotron Orbital Radiation Lithography Uchida N, Kuwabara O, Ishibashi Y, Kikuiri N, Hirano R, Nishida J, Nishizaka T, Kikuchi Y, Yoshino H Journal of Vacuum Science & Technology B, 11(6), 2997, 1993 |