검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Observation of Si(100) surfaces annealed in hydrogen gas ambient by scanning tunneling microscopy Kuribayashi H, Gotoh M, Hiruta R, Shimizu R, Sudoh K, Iwasaki H Applied Surface Science, 252(15), 5275, 2006 |
| 2 |
Flattening of micro-structured Si surfaces by hydrogen annealing Hiruta R, Kuribayashi H, Shimizu R, Sudoh K, Iwasaki H Applied Surface Science, 252(15), 5279, 2006 |
| 3 |
Evolution of surface morphology of Si-trench sidewalls during hydrogen annealing Hiruta R, Kuribayashi H, Shimizu S, Sudoh K, Iwasaki H Applied Surface Science, 237(1-4), 63, 2004 |
| 4 |
Shape transformation of silicon trenches during hydrogen annealing Kuribayashi H, Hiruta R, Shimizu R, Sudoh K, Iwasaki H Journal of Vacuum Science & Technology A, 21(4), 1279, 2003 |