검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Papers from the 37th International-Symposium on Electron, Ion, and Photon Beams - 1-4 June 1993 Sheraton-Harbor-Island-Hotel San-Diego, California - Preface Hohn FJ Journal of Vacuum Science & Technology B, 11(6), 2151, 1993 |
| 2 |
Electron-Beam Lithography for Advanced Device Prototyping - Process Tool Metrology Rosenfield MG, Thomson MG, Coane PJ, Kwietniak KT, Keller J, Klaus DP, Volant RP, Blair CR, Tremaine KS, Newman TH, Hohn FJ Journal of Vacuum Science & Technology B, 11(6), 2615, 1993 |