검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The Effect of Hydrogen Annealing on Oxygen Precipitation Behavior and Gate Oxide Integrity in Czochralski Si Wafers Izunome K, Shirai H, Kashima K, Yoshikawa J, Hojo A Journal of the Electrochemical Society, 144(10), 3695, 1997 |